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Effect of wafer-brush relative velocity on non-uniform PVA brush wear and cleaning consistency in oxide post-CMP cleaning
- 제목
- Effect of wafer-brush relative velocity on non-uniform PVA brush wear and cleaning consistency in oxide post-CMP cleaning
- 저자
- 박진구
- 발행일
- 2025-10-29
- 학회명
- ICPT 2025
- 개최지
- 홍콩