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Low Temperature Growth of 2D MoS2 Thin Films by Plasma-enhanced Atomic Layer Deposition Using a Novel Precursor
- 제목
- Low Temperature Growth of 2D MoS2 Thin Films by Plasma-enhanced Atomic Layer Deposition Using a Novel Precursor
- 저자
- 안지훈
- 발행일
- 2022-11-07
- 학회명
- The 7th International Conference on Electronic Materials and Nanotechnology for Green Environment 2022