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The Growth and Characteristics of SrRuO3 Thin Films for Electrodes on Amourphous SiO2 Substrate by RF-Sputtering
- 제목
- The Growth and Characteristics of SrRuO3 Thin Films for Electrodes on Amourphous SiO2 Substrate by RF-Sputtering
- 저자
- 안지훈
- 발행일
- 2020-02-14
- 학회명
- 27회 반도체학술대회