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Atomic Layer Deposition of Metal Thin Film Using Discrete Feeding Method (DFM) and Electric Field/Potential Assisted-Atomic Layer Deposition (EA-ALD)
- 제목
- Atomic Layer Deposition of Metal Thin Film Using Discrete Feeding Method (DFM) and Electric Field/Potential Assisted-Atomic Layer Deposition (EA-ALD)
- 저자
- 박태주
- 발행일
- 2021-01-27
- 학회명
- 제28회 한국반도체학술대회