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Area-Selective Atomic Layer Deposition of Ru Thin Films Using Phosphonic Acid Self-Assembled Monolayers for Metal/Dielectric Selectivity
- 제목
- Area-Selective Atomic Layer Deposition of Ru Thin Films Using Phosphonic Acid Self-Assembled Monolayers for Metal/Dielectric Selectivity
- 저자
- 김우희
- 발행일
- 2023-07-25
- 학회명
- The 23rd International Conference on Atomic Layer Deposition (ALD 2023)