상세 보기
Nucleation behavior and growth characteristics of Atomic-Layer deposited Iridium thin films with TICP and Oxygen
- 제목
- Nucleation behavior and growth characteristics of Atomic-Layer deposited Iridium thin films with TICP and Oxygen
- 저자
- 박태주
- 발행일
- 2023-10-09
- 학회명
- 244th ECS meeting
- 개최지
- 스웨덴 Gothenburg