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Growth of Wafer-Scale Monolayer MoS2 Using Adsorbate-Controlled Atomic Layer Deposition

제목
Growth of Wafer-Scale Monolayer MoS2 Using Adsorbate-Controlled Atomic Layer Deposition
저자
안지훈
발행일
2020-06-29
학회명
ALD/ALE 2020

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