Fabrication of a Ferroelectric Amorphous Oxide Semiconductor FET with Low Temperature Hf-Based Ferroelectric for Emerging Memory Applications

제목
Fabrication of a Ferroelectric Amorphous Oxide Semiconductor FET with Low Temperature Hf-Based Ferroelectric for Emerging Memory Applications
저자
김영현
발행일
2023-08-25
학회명
IMID2023
개최지
BEXCO