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Inherently Area-Selective Atomic Layer Deposition for High-K Dielectrics by Catalytic Local Activation
- 제목
- Inherently Area-Selective Atomic Layer Deposition for High-K Dielectrics by Catalytic Local Activation
- 저자
- 안지훈
- 발행일
- 2021-06-28
- 학회명
- AVS ALD2021