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Simple fabrication of highly sensitive capacitive pressure sensors using a porous dielectric layer with cone-shaped patterns
- 제목
- Simple fabrication of highly sensitive capacitive pressure sensors using a porous dielectric layer with cone-shaped patterns
- 저자
- 오제훈
- 발행일
- 2019-09-25
- 학회명
- 45th International Conference on Micro and Nano Engineering (MNE 2019)
- 개최지
- Rhodes, Greece