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Characterization of incoming PVA brush by an ultrasonication break-in process
- Lee, Jung hwan;
- Pyun, Hae jung;
- Purushothaman, Muthukrishnan;
- Paluvai, Nagarjuna reddy;
- Cho, Byoungjun;
- ... Park, Jin-Goo;
- 외 4명
- 제목
- Characterization of incoming PVA brush by an ultrasonication break-in process
- 저자
- Lee, Jung hwan; Pyun, Hae jung; Purushothaman, Muthukrishnan; Paluvai, Nagarjuna reddy; Cho, Byoungjun; Han, Kwang min; Shima, Shohei; Hamada, Satomi; Hiyama, Hirokuni; Park, Jin-Goo
- 발행일
- 2017-00
- 학회명
- 2017 International Conference on Planarization/CMP Technology, ICPT 2017
- 개최국가
- 독일
- 학회 개최일
- 2017-10-11 ~ 2017-10-13
- 언어
- ENG