상세 보기
Ferroelectric Properties of Hf1-xZrxO2 Thin Films Deposited by Atomic Layer Deposition Using Cyclopentadienyl Cocktail-precursor Without Annealing Process
- 제목
- Ferroelectric Properties of Hf1-xZrxO2 Thin Films Deposited by Atomic Layer Deposition Using Cyclopentadienyl Cocktail-precursor Without Annealing Process
- 저자
- 안지훈
- 발행일
- 2021-01-25
- 학회명
- The 28th Korean Conference in Semiconductors