상세 보기
Ultra-Low Resistivity Molybdenum Carbide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition Using a Cyclopentadienyl-based precursor
- 제목
- Ultra-Low Resistivity Molybdenum Carbide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition Using a Cyclopentadienyl-based precursor
- 저자
- 안지훈
- 발행일
- 2022-05-18
- 학회명
- 2022년도 한국재료학회 춘계학술대회