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Characteristics of high power laser shock waves and their cleaning performance
- Kim, Tae Gon;
- Yoo, Young Sam;
- Son, Il Ryong;
- Jang, Deoksuk;
- Kim, Dongsik;
- ... Park, Jin-Goo;
- 외 3명
Citations
SCOPUS
3초록
Plasma shock waves induced by focusing a Q-switched Nd:YAG laser at a maximum energy of 1.8 J in air were characterized by a laser beam deflection method and applied to the particle removal. The dimension of plasma plume and velocities of shock waves were measured as a function of laser energy and gap distance. The shock wave velocity decayed rapidly as the gap distance increased. The laser shock wave cleaned area followed the shape of shock waves, which was heart-shaped. The shorter gap distance, the higher particle removal efficiency (PRE) was observed. PRE of 98% was achieved by optimizing the laser energy, gap distance, and wafer scanning procedure. ©The Electrochemical Society.
키워드
(OTDR) technology; Applied (CO); Electrochemical Society (ECS); gap distances; High powers; International symposium; Laser beam deflection method (LBDM); Laser energies; Laser shock waves; maximum energy; particle removal; Particle-removal efficiency (PRE); Plasma plumes; Q switched Nd:YAG lasers; Semi-conductor cleaning; Shock wave velocity; Surface conditioning; Air cleaners; Blood vessel prostheses; Computer networks; Electric conductivity; Gallium alloys; High power lasers; Laser beams; Lasers; Neodymium; Particle size; Plasma (human); Plasmas; Pulsed laser deposition; Removal; Scanning; Semiconductor device manufacture; Semiconductor device models; Semiconductor devices; Semiconductor lasers; Semiconductor materials; Semiconductor switches; Shock waves; Solid state lasers; Surface cleaning; Surfaces; Technology; Waves
- 제목
- Characteristics of high power laser shock waves and their cleaning performance
- 저자
- Kim, Tae Gon; Yoo, Young Sam; Son, Il Ryong; Jang, Deoksuk; Kim, Dongsik; Lee, Jong Myung; Choi, Jae Sung; Busnaina, Ahmed .A.; Park, Jin-Goo
- 발행일
- 2007-00
- 유형
- Conference Paper
- 저널명
- ECS Transactions
- 권
- 11
- 호
- 2
- 페이지
- 41 ~ 46
- 언어
- ENG
- 출판사
- Electrochemical Society, Inc.
- 발행국가
- 미국
- 분량
- 6 페이지
- ISSN
- E 1938-6737
P 1938-5862