상세 보기
Area-Selective Atomic Layer Deposition for Self-Aligned Bottom-Up Nanopatterning
- 제목
- Area-Selective Atomic Layer Deposition for Self-Aligned Bottom-Up Nanopatterning
- 저자
- 김우희
- 발행일
- 2025-07-01
- 학회명
- The International Nanophotonics and Nonoenergy Conference (INPEC) 2025