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Inherently Area-Selective Atomic Layer Deposition of SiO2 through Chemoselective Adsorption of an Aminodisilane Precursor on Oxide/Nitride Substrates
- 제목
- Inherently Area-Selective Atomic Layer Deposition of SiO2 through Chemoselective Adsorption of an Aminodisilane Precursor on Oxide/Nitride Substrates
- 저자
- 김우희
- 발행일
- 2022-06-28
- 학회명
- ALD 2022
- 개최지
- ICC Ghent