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Low-resistivity Molybdenum Nitride Thin Films Deposited by Atomic Layer Deposition for Cu Diffusion Barrier
- 제목
- Low-resistivity Molybdenum Nitride Thin Films Deposited by Atomic Layer Deposition for Cu Diffusion Barrier
- 저자
- 안지훈
- 발행일
- 2023-04-11
- 학회명
- 2023 MRS Spring Meeting