Effect of the Ga Cycle on the In-Ga-Sn-O Thin-Film Transistors Performance Deposited via Thermal Atomic Layer Deposition

제목
Effect of the Ga Cycle on the In-Ga-Sn-O Thin-Film Transistors Performance Deposited via Thermal Atomic Layer Deposition
저자
안지훈
발행일
2025-11-26
학회명
8th International Conference on Advanced Electromaterials