Characterization of Wetting Behavior on High Aspect Ratio Multilayer Structure

초록

The wetting behavior of solutions was successfully visualized in the high aspect ratio multi-stack trench pattern using the inclined-AFM methodology. The visualization allows the characterization of the wetting behavior of cleaning solutions on various hydrophobic surfaces. The experimental results agreed with the values calculated by the Wenzel & Cassie-Baxter model. The wetting characteristic analysis using inclined-AFM is an efficient method regardless of pattern dimensions. © 2022 ECS - The Electrochemical Society.