상세 보기
Topographically Selective Atomic Layer Deposition of HfO2 Thin Films in High Aspect Ratio Structures by Vapor-Dosed Surface Protector
- 제목
- Topographically Selective Atomic Layer Deposition of HfO2 Thin Films in High Aspect Ratio Structures by Vapor-Dosed Surface Protector
- 저자
- 김우희
- 발행일
- 2025-10-10
- 학회명
- ADMETA 2025