The Comprehensive Study of the Growth and Characteristics of SrRuO3 Thin Films Deposited on SiO2 Substrates without Buffer Layer by RF Magnetron Sputtering

제목
The Comprehensive Study of the Growth and Characteristics of SrRuO3 Thin Films Deposited on SiO2 Substrates without Buffer Layer by RF Magnetron Sputtering
저자
안지훈
발행일
2020-11-03
학회명
ENGE2020
개최지
제주도