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Rutile-TiO2 thin films deposited by Atomic Layer Deposition using thin SnO2 seed layer and Sn doping for DRAM capacitor
- 제목
- Rutile-TiO2 thin films deposited by Atomic Layer Deposition using thin SnO2 seed layer and Sn doping for DRAM capacitor
- 저자
- 안지훈
- 발행일
- 2023-01-18
- 학회명
- Electonic Materials and Applications 2023