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Nanoscale ceramic thin film deposition for manufacturing substrates with enhanced plasma resistance
- 제목
- Nanoscale ceramic thin film deposition for manufacturing substrates with enhanced plasma resistance
- 저자
- 조홍백
- 발행일
- 2023-11-17
- 학회명
- The 37th International Korea-Japan Seminar on Ceramics
- 개최지
- 곤지암리조트