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Effect of wafer-brush relative velocity on non-uniform PVA brush wear and cleaning consistency in oxide post-CMP cleaning
- 제목
- Effect of wafer-brush relative velocity on non-uniform PVA brush wear and cleaning consistency in oxide post-CMP cleaning
- 저자
- 김태곤
- 발행일
- 2025-10
- 유형
- Proceeding
- 저널명
- International Conference on Planarization/CMP Technology
- 페이지
- 50 ~ 53