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Molecular Layer Deposition of a Tin-Based Organic-Inorganic Hybrid Thin Films for Photoresist
- 제목
- Molecular Layer Deposition of a Tin-Based Organic-Inorganic Hybrid Thin Films for Photoresist
- 저자
- 안지훈
- 발행일
- 2024-11-12
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2024