상세 보기
Ultra-Low Resistivity Mo2C Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition Using a Novel precursor
- 제목
- Ultra-Low Resistivity Mo2C Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition Using a Novel precursor
- 저자
- 안지훈
- 발행일
- 2022-01-26
- 학회명
- 29회 반도체학술대회