Low Temperature Growth of Wafer-Scale 2D MoS2 Thin Films by Cyclic Metal-Organic Chemical Vapor Deposition

제목
Low Temperature Growth of Wafer-Scale 2D MoS2 Thin Films by Cyclic Metal-Organic Chemical Vapor Deposition
저자
안지훈
발행일
2020-11-03
학회명
ENGE2020
개최지
제주도