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Enhancing Surface Smoothness in Ultra-thin Metal films with the Combined Atomic Layer Deposition and Etching Process
- 제목
- Enhancing Surface Smoothness in Ultra-thin Metal films with the Combined Atomic Layer Deposition and Etching Process
- 저자
- 김우희
- 발행일
- 2023-11-22
- 학회명
- KISM 2023