ScholarWorks@Hanyang University ERICA Campus

상세 보기

Effect of Hydrogen Introduction on Plasma Sulfurization of MoO3 at Low Temperature

제목
Effect of Hydrogen Introduction on Plasma Sulfurization of MoO3 at Low Temperature
저자
안지훈
발행일
2020-02-13
학회명
27회 반도체학술대회

ScholarWorks@Hanyang University ERICA Campus

(15588) 경기도 안산시 상록구 한양대학로 55 Tel. +82-31-400-4269

COPYRIGHT © Hanyang University ERICA Campus All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.