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Enhanced Ferroelectricity of HZO Thin Films by Inserting Seed Layer Deposited via Atomic Layer Deposition
- 제목
- Enhanced Ferroelectricity of HZO Thin Films by Inserting Seed Layer Deposited via Atomic Layer Deposition
- 저자
- 안지훈
- 발행일
- 2021-11-09
- 학회명
- ICAE 2021