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Investigation of Wafer Edge Tilting in Capacitively Coupled Plasmas via IEADFDriven Monte Carlo Feature-Scale Simulation

제목
Investigation of Wafer Edge Tilting in Capacitively Coupled Plasmas via IEADFDriven Monte Carlo Feature-Scale Simulation
저자
김호준
발행일
2025-11-13
학회명
Korean International Semiconductor Conference on Manufacturing Technology 2025
개최지
Paradise Hotel Busan (Haeundae Beach), Busan, Korea

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