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Study on the Chemical Durability and Defect Reduction Effects of Ceramic-Based CVD CMP Conditioners
- 제목
- Study on the Chemical Durability and Defect Reduction Effects of Ceramic-Based CVD CMP Conditioners
- 저자
- 박진구
- 발행일
- 2024-01-26
- 학회명
- 제 31회 한국반도체학술대회 The 31st Korean Conference on Semiconductors (KCS 2024)
- 개최지
- 경주