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Improvement of Ru Thin Films Selectivity with Advanced Area-Selective Atomic Layer Deposition
- 제목
- Improvement of Ru Thin Films Selectivity with Advanced Area-Selective Atomic Layer Deposition
- 저자
- 김우희
- 발행일
- 2020-11-02
- 학회명
- The 6th International Conference on Electronic Materials and Nanotechnology for Green Environment
- 개최지
- 제주도 Ramada Plaza Jeju Hotel