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Effect of H2/N2 ratio on Molybdenum Nitride Thin Films Deposited by Atomic Layer Deposition
- 제목
- Effect of H2/N2 ratio on Molybdenum Nitride Thin Films Deposited by Atomic Layer Deposition
- 저자
- 안지훈
- 발행일
- 2023-11-20
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2023