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Optimization for enhanced electrical properties of ZrO2/HfO2 laminated structure for metal-insulator-metal capacitors

제목
Optimization for enhanced electrical properties of ZrO2/HfO2 laminated structure for metal-insulator-metal capacitors
저자
안지훈
발행일
2023-11-20
학회명
Korean International Semiconductor Conference on Manufacturing Technology 2023

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