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Area-Selective Atomic Layer Deposition of High-k Dielectrics by Vapor-Dosed Phosphonic Acid Inhibitors Combined with Selective Lift-Off
- 제목
- Area-Selective Atomic Layer Deposition of High-k Dielectrics by Vapor-Dosed Phosphonic Acid Inhibitors Combined with Selective Lift-Off
- 저자
- 김우희
- 발행일
- 2023-02-15
- 학회명
- 제 30회 한국반도체학술대회