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Enhanced Growth Behavior and Electrical Properties of Atomic-Layer-Deposited La2O3 film at High Temperature Using Novel Precursor with Discrete Feeding Method
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- Enhanced Growth Behavior and Electrical Properties of Atomic-Layer-Deposited La2O3 film at High Temperature Using Novel Precursor with Discrete Feeding Method
- 저자
- 박태주
- 발행일
- 2024-10-30
- 학회명
- 2024 한국표면공학회 추계학술대회 및 특별강습회
- 개최지
- 여수 디오션리조트