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Growth and Characterization of Iridium Thin Films Grown by Atomic Layer Deposition with a TICP and Oxygen
- 제목
- Growth and Characterization of Iridium Thin Films Grown by Atomic Layer Deposition with a TICP and Oxygen
- 저자
- 박태주
- 발행일
- 2022-11-09
- 학회명
- ENGE 2022
- 개최지
- 제주도 라마다 호텔