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Low-Temperature Chemical Vapor Deposition of SnOx Thin Film toward Next-Generation EUV Dry Resist
- 제목
- Low-Temperature Chemical Vapor Deposition of SnOx Thin Film toward Next-Generation EUV Dry Resist
- 저자
- 김우희
- 발행일
- 2023-06-09
- 학회명
- Global Conference on Innovation Materials 2023 (GCIM 2023)