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Investigation of the root cause of the scratch formation during copper post-CMP brush scrubbing
- 제목
- Investigation of the root cause of the scratch formation during copper post-CMP brush scrubbing
- 저자
- 김태곤
- 발행일
- 2024-10-16
- 학회명
- The 19th International Conference on Planarization/CMP Technology 2024
- 개최지
- Kurhaus Wiesbaden Germany