Stitching-loss-tolerant silicon nitride waveguides on glass for panel-level optical interconnects

초록

In this Letter, we propose a stitching-loss-tolerant silicon nitride (SiN) waveguide structure that alleviates optical loss caused by reticle stitching, which inevitably arises in i-line stepper lithography suitable for low-cost, large-area fabrication. At a wavelength of 1310 nm, the measured stitching loss of straight waveguides is 0.105 dB/interface. In contrast, tapered waveguides with stitching widths (Ws) of 2 & micro;m and 3.5 & micro;m demonstrate significantly reduced losses of 0.0678 and 0.0213 dB/interface. These results pave the way for glass-based panel-level optical interconnect enabled by cost-effective fabrication, addressing a critical bottleneck in next-generation optical packaging. (c) 2026 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.