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Research on high-performance/high-resolution on-silicon frontplane using atomic layer deposition
- 제목
- Research on high-performance/high-resolution on-silicon frontplane using atomic layer deposition
- 저자
- 조성용
- 발행일
- 2025-08-05
- 학회명
- International Society for Photonics & Optics (SPIE) 2025
- 개최지
- San Diego Convention Center