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Area Selective Atomic Layer Deposition of Nb2O5 for Improved Interface Quality between ZrO2 Dielectric and Bottom TiN Electrode
- 제목
- Area Selective Atomic Layer Deposition of Nb2O5 for Improved Interface Quality between ZrO2 Dielectric and Bottom TiN Electrode
- 저자
- 김우희
- 발행일
- 2023-11-22
- 학회명
- KISM 2023