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PVA brushes; its characteristics and effect on post CMP cleaning
- 제목
- PVA brushes; its characteristics and effect on post CMP cleaning
- 저자
- 박진구
- 발행일
- 2018-08-14
- 학회명
- 22nd International Symposium on Chemical-Mechanical Planarization
- 개최지
- USA, Crowne Plaza Lake Placid, NY