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Enhanced Metal/Dielectric Selectivity in Ru Atomic Layer Deposition with Alkyl-Chain Length Dependent Phosphonic Aicd Self-Assembled Monlayers
- 제목
- Enhanced Metal/Dielectric Selectivity in Ru Atomic Layer Deposition with Alkyl-Chain Length Dependent Phosphonic Aicd Self-Assembled Monlayers
- 저자
- 김우희
- 발행일
- 2023-11-22
- 학회명
- KISM 2023