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Effects of Y Doping on Ferroelectric and Electrical Properties of As-deposited Hf1-xZrxO2 Thin Films via Atomic Layer Deposition
- 제목
- Effects of Y Doping on Ferroelectric and Electrical Properties of As-deposited Hf1-xZrxO2 Thin Films via Atomic Layer Deposition
- 저자
- 안지훈
- 발행일
- 2023-01-18
- 학회명
- Electonic Materials and Applications 2023