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Effects of High-Temperature Deposition on Structural and Physical Properties of High-k ZrO₂ and HfO₂ Thin Films
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- Effects of High-Temperature Deposition on Structural and Physical Properties of High-k ZrO₂ and HfO₂ Thin Films
- 저자
- 안지훈
- 발행일
- 2026-04-09
- 학회명
- 2026 한국세라믹학회 춘계학술대회