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Ultrathin Metal Films with Low Resistivity via Atomic Layer Deposition: Process Pressure Effect on Initial Growth Behavior of Ru Films
- 제목
- Ultrathin Metal Films with Low Resistivity via Atomic Layer Deposition: Process Pressure Effect on Initial Growth Behavior of Ru Films
- 저자
- 안지훈
- 발행일
- 2024-11-14
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2024