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Enhanced Characteristics of HfO2 Deposited by Atomic Layer Deposition Using Novel Precursor with Improved Thermal Stability
- 제목
- Enhanced Characteristics of HfO2 Deposited by Atomic Layer Deposition Using Novel Precursor with Improved Thermal Stability
- 저자
- 안지훈
- 발행일
- 2021-11-09
- 학회명
- ICAE 2021
- 개최지
- 제주도