상세 보기
Compositional Dependence of Ferroelectric Properties in Hf1-xZrxO2 Thin Films Using a Thermally Stabilized Novel Precursor
- 제목
- Compositional Dependence of Ferroelectric Properties in Hf1-xZrxO2 Thin Films Using a Thermally Stabilized Novel Precursor
- 저자
- 안지훈
- 발행일
- 2024-11-12
- 학회명
- Korean International Semiconductor Conference on Manufacturing Technology 2024